Yintoni ipleyiti yokupolisha i-wafer ye-ceramic ye-alumina ecocekileyo kakhulu?

Ngophuhliso olukhawulezileyo lweshishini le-semiconductor, ubungakanani beli shishini bunyuke ngokukhawuleza, kwaye izixhobo zokwenza i-semiconductor ziqhubekile nokuguquka zibe ngokuchanekileyo nangokuntsonkotha. Ngenxa yokuba ii-ceramics zinezibonelelo zobulukhuni obuphezulu, i-modulus ephezulu elastiki, ukumelana nokuguguleka okuphezulu, ubushushu obuphezulu, ukumelana nokugqwala, ukwanda okuphantsi, njl.njl., zingasetyenziswa njengeenxalenye zomatshini wokupolisha we-silicon, izixhobo zonyango lobushushu be-epitaxial/oxidation/diffusion, umatshini we-lithography, izixhobo zokubeka, izixhobo zokugcada ze-semiconductor, umatshini wokufakelwa kwe-ion kunye nezinye izixhobo, ngoko ke uphando nophuhliso kunye nokuveliswa kwezixhobo ze-ceramic ezichanekileyo zichaphazela ngokuthe ngqo uphuhliso lweshishini le-semiconductor. Iimfuno zobugcisa zokulungiselela kwayo ziya zisanda.

I-alumina ecocekileyo kakhulu, i-99.7% -99.9% ye-alumina.
Amandla aphezulu oomatshini, ukumelana nokuguguleka okuphezulu, ubushushu obuphezulu bombane, uzinzo oluphezulu lweekhemikhali, ukumelana nobushushu obuhle kunye nokumelana nokugqwala. Okwangoku, ukusetyenziswa kwe-ceramic grinding disc semiconductor silicon wafer yeyona ndlela ibalaseleyo nesemgangathweni yokugaya. Inkqubo yokugaya enamacala amabini isetyenziselwa ukugaya i-silicon wafer esikiweyo, kwaye umgangatho we-grinding wafer uphuculwa ngokuphucula inkqubo yokugaya (izinto zediski, ulwelo lokugaya, uxinzelelo lokugaya kunye nesantya sokugaya, njl.njl.). Ngokukodwa, ukusetyenziswa kweepleyiti ze-ceramic endaweni yeepleyiti zesinyithi eziphosiweyo, ukuphepha ukugaya kumphezulu ophambili we-wafer ebangelwa zizilonda okanye ungcoliseko, ukunciphisa ukungeniswa kwee-ion zesinyithi, kunokunciphisa ukucubungula okulandelayo kwe-silicon, kufinyeze ixesha lenkqubo elandelayo (yokugqwala), kuphucule ukusebenza kakuhle kwemveliso, kwaye kunciphise ukulahleka kokucubungula kwe-silicon, kuphucule kakhulu ukusetyenziswa kwe-silicon.

Ipleyiti yokupholisha i-wafer ephezulu ye-aluminaIsetyenziswa kwi-semiconductor, petroleum, chemical, photovoltaic, liquid crystal kunye neminye imboni, efana ne-mechanical parts, electronic parts, microwave induction disk, insulation materials kunye nezinye iindawo, semiconductor devices, vacuum devices, liquid crystal manufacturing devices kunye nezinye iindawo. Ii-alumina ceramics ezinkulu nezicocekileyo zinexabiso elibalulekileyo kwishishini le-sapphire kunye ne-semiconductor chips. Yinkxaso ephambili kwaye ingasetyenziswa kwi-chemical mechanical polishing (CMP) yee-wafers ze-silicon ze-sapphire kunye ne-semiconductor. Ii-alumina ceramics ezinkulu nezicocekileyo nazo zingasetyenziswa njenge-alumina substrate ye-LCD.